SIOS: High-precision length measuring technique for laboratory and industry
September, 2021: Multi-beam-interferometers measure dynamic parameters simultaneously and with nanometer precision over a length up to 80 meters Optical adjustment aids simplify the alignment process From medical technology to semiconductor and optics industries, as well as for calibration tasks, highest accuracy is required. Laser interferometers measure displacements with an accuracy up to 0.1 ppm and connect…


